Diagnosegeräte
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Ultraclean Surface Processing of Silicon Wafers
Secrects of VLSI Manufacturing Hattori, Takeshi; Hattori, T.; Heusler, S. Details 1. Aufl., 1998, Springer-Verlag Berlin Heidelberg, Berlin, 616 S. ISBN: 3-540-61672-1, ISBN-13: 978-3-540-61672-6 A totally new concept for clean surface processing of Si wafers is introduced in this book. Some fifty distinguished researchers and engineers from the leading... Fachgebiete: |
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349,99 €
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3-5 Tage kaufen |